Evaluation Report:
Please call 856-697-4400 or email JMC for more information about our TSK UF200 FP200A Wafer Prober. Probing Machine: UF2000 Most significant machine model for 200mm wafers High precision, high rigidity machine.
Power Supply | VAC | Air Pressure | Mpa | Vacuum Pressure | cmHg |
Spec. | 120 VAC | Spec. | 0.4 Mpa [4 kgf]or higher | Spec 140 cmHg | -50 cmHg [-400mmHg] or lower |
No | Item | Criterion | Judgment | Measurement/result |
1 | Keyboard operation | Checking with Maintenance Adjustment Utilities | OK/NG | OK |
2 | Printer Performance | Checking with printer Utilities | OK/NG | NG |
3 | Displacement sensor output voltage | 0V + 0.3V at E1 camera High Mag. Focus High | OK/NG | V -0.079 |
4 | X/Y Morie scale Lissajous figure check | The Lissajous figures must be circular and large | OK/NG | OK |
5 | Fuses | Visual check | OK/NG | OK |
6 | X/Y guides lead screws cleaning greasing | Renewing grease | Renewed | |
7 | Theta lead screw cleaning greasing | Renewing grease | Renewed | |
8 | Other guides lead screws cleaning greasing | Renewing grease | Renewed | |
9 | Checking the internal DC voltage supply | 5V supply 4.90 ~ 5.25V 12V supply 10.8 ~ 13.2V 24V supply 21.6 ~ 26.4V 72V supply 73.2 ~ 82.8V | OK/NG OK/NG OK/NG OK/NG | 4.9 12.1 23.8 72.0 |
10 | Checking squareness between X and Y axis | X deviation Y span less than 2um/200mm | OK/NG | Less than 1um |
11 | Checking position accuracies | Position accuracies span X: less than 3um/200mm Y: less than 3um/200mm | OK/NG OK/NG | OK OK |
12 | Chuck top flatness | Different between Man/Min. at 5 points Standard chuck 10um L C R F | OK/NG | Cent. 5339 mV |
13 | Leakage current breaker performance | Test switch can shut down the power supply to prober | OK/NG | OK |
14 | E1 alignment camera | Pin to pad alignment | OK/NG | 0um |
15 | Hot chuck calibration | 30 ~ 150 deg. C | OK/NG | OK |
16 | Reticle marker | Alignment | OK/Reset | OK |
17 | Theta alignment | OK/NG | OK | |
18 | OCR | Wafer ID reader | OK/NG | OK |
19 | E2 camera | switching error | OK/NG | OK |
20 | E1 camera | switching error | OK/NG | OK |
21 | Hot chuck | 30 ~ 150 | OK/NG | OK |
22 | Wafer handling | Turn table to Main chuck | OK/NG | Center |
23 | Wafer handling | Transfer from cassette to sub chuck | OK/NG | Center |
F02034DP October 25, 2004